Service

TRAINING

-OPERATION

-PM

Used Tool

-GASONICS PEP3510A

-GASONICS PEP4800H (IRIDIA)

-GASONICS L3510

Hardware UPGRADE

-PEP3510 TEMP CONTROLLER

-PROCESS CONTROLLER

-L3510 ROBOT

INSTALL& RELOCATION

-GaSonics L3510/ PEP3510A /PEP 4800H

-Refurbishment

-Installation

-Relocation

-TIER-1

-TIER-2

OEM PARTS:

-QUARTZ

-CONTROLLER

-ROBOT

-PEP GUI (15")

-L3510 LCD MONITOR

-L3510 PCB

PARTS REPAIR

-MICROWAVE GENERATOR

C12935/L3510

C13170/PEP3510

D13765/ PEP IRIDIA

-YASKAWA ROBOT

-BROOKS Z-BOT-I /II

-MINI CONTROLLER

(GAS/MISC/MWV/LAMP/CLUSTER)

-PROCESS CONTROLLER

-PEP4800H LAMP CONTROLLER

-EUROTHEM TEMP CONTROLLER